4/8/2011	11:21:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/8/2011	11:21:20 AM	Recipe started at 11:21 AM
4/8/2011	11:21:20 AM	H2 valve closed
4/8/2011	11:21:20 AM	BCl3 valve closed
4/8/2011	11:21:20 AM	PH3 valve closed
4/8/2011	11:21:20 AM	SiCl4 pre valve closed
4/8/2011	11:21:20 AM	SiCl4 post valve closed
4/8/2011	11:21:20 AM	Main Vac valve closed
4/8/2011	11:21:20 AM	Bypass valve closed
4/8/2011	11:21:20 AM	Bubbler valve closed
4/8/2011	11:21:20 AM	Helium valve opened
4/8/2011	11:21:20 AM	Helium MFC set to  500.000000
4/8/2011	11:21:20 AM	H2 MFC set to  0.000000
4/8/2011	11:21:20 AM	BCl3 MFC set to  0.000000
4/8/2011	11:21:20 AM	PHl3 MFC set to  0.000000
4/8/2011	11:21:20 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:21:20 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:21:20 AM	Tube furnace set to 0
4/8/2011	11:22:40 AM	Helium valve closed
4/8/2011	11:22:40 AM	H2 valve closed
4/8/2011	11:22:40 AM	BCl3 valve closed
4/8/2011	11:22:40 AM	PH3 valve closed
4/8/2011	11:22:40 AM	SiCl4 pre valve closed
4/8/2011	11:22:40 AM	SiCl4 post valve closed
4/8/2011	11:22:40 AM	Main Vac valve closed
4/8/2011	11:22:40 AM	Bypass valve closed
4/8/2011	11:22:40 AM	Bubbler valve closed
4/8/2011	11:22:40 AM	Helium MFC set to  0.000000
4/8/2011	11:22:40 AM	H2 MFC set to  0.000000
4/8/2011	11:22:40 AM	BCl3 MFC set to  0.000000
4/8/2011	11:22:40 AM	PHl3 MFC set to  0.000000
4/8/2011	11:22:40 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:22:40 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:22:40 AM	Tube furnace set to 0
4/8/2011	11:22:40 AM	Run finished at 11:22 AM
4/8/2011	11:22:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/8/2011	11:32:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2011	11:32:47 AM	Recipe started at 11:32 AM
4/8/2011	11:32:47 AM	Helium valve closed
4/8/2011	11:32:47 AM	H2 valve closed
4/8/2011	11:32:48 AM	BCl3 valve closed
4/8/2011	11:32:48 AM	PH3 valve closed
4/8/2011	11:32:48 AM	SiCl4 pre valve closed
4/8/2011	11:32:48 AM	SiCl4 post valve closed
4/8/2011	11:32:48 AM	Main Vac valve closed
4/8/2011	11:32:48 AM	Bubbler valve closed
4/8/2011	11:32:48 AM	Bypass valve opened
4/8/2011	11:32:48 AM	Helium MFC set to  0.000000
4/8/2011	11:32:48 AM	H2 MFC set to  0.000000
4/8/2011	11:32:48 AM	BCl3 MFC set to  0.000000
4/8/2011	11:32:48 AM	PHl3 MFC set to  0.000000
4/8/2011	11:32:48 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:32:48 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:32:48 AM	Tube furnace set to 0
4/8/2011	11:33:37 AM	Helium valve closed
4/8/2011	11:33:37 AM	H2 valve closed
4/8/2011	11:33:37 AM	BCl3 valve closed
4/8/2011	11:33:37 AM	PH3 valve closed
4/8/2011	11:33:37 AM	SiCl4 pre valve closed
4/8/2011	11:33:37 AM	SiCl4 post valve closed
4/8/2011	11:33:37 AM	Bubbler valve closed
4/8/2011	11:33:37 AM	Main Vac valve opened
4/8/2011	11:33:37 AM	Bypass valve opened
4/8/2011	11:33:37 AM	Helium MFC set to  0.000000
4/8/2011	11:33:37 AM	H2 MFC set to  0.000000
4/8/2011	11:33:37 AM	BCl3 MFC set to  0.000000
4/8/2011	11:33:37 AM	PHl3 MFC set to  0.000000
4/8/2011	11:33:37 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:33:37 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:33:37 AM	Tube furnace set to 0
4/8/2011	11:33:37 AM	Run finished at 11:33 AM
4/8/2011	11:33:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2011	11:34:00 AM	Tube furnace set to 300
4/8/2011	11:36:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/8/2011	11:36:47 AM	Recipe started at 11:36 AM
4/8/2011	11:36:47 AM	Helium valve closed
4/8/2011	11:36:47 AM	H2 valve closed
4/8/2011	11:36:47 AM	BCl3 valve closed
4/8/2011	11:36:47 AM	PH3 valve closed
4/8/2011	11:36:47 AM	SiCl4 pre valve closed
4/8/2011	11:36:47 AM	SiCl4 post valve closed
4/8/2011	11:36:47 AM	Main Vac valve closed
4/8/2011	11:36:47 AM	Bubbler valve closed
4/8/2011	11:36:47 AM	Bypass valve opened
4/8/2011	11:36:47 AM	Helium MFC set to  0.000000
4/8/2011	11:36:47 AM	H2 MFC set to  0.000000
4/8/2011	11:36:47 AM	BCl3 MFC set to  0.000000
4/8/2011	11:36:47 AM	PHl3 MFC set to  0.000000
4/8/2011	11:36:47 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:36:47 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:36:47 AM	Tube furnace set to 0
4/8/2011	11:36:47 AM	Helium valve closed
4/8/2011	11:36:47 AM	H2 valve closed
4/8/2011	11:36:47 AM	BCl3 valve closed
4/8/2011	11:36:47 AM	PH3 valve closed
4/8/2011	11:36:47 AM	SiCl4 pre valve closed
4/8/2011	11:36:47 AM	SiCl4 post valve closed
4/8/2011	11:36:47 AM	Bubbler valve closed
4/8/2011	11:36:47 AM	Main Vac valve opened
4/8/2011	11:36:47 AM	Bypass valve opened
4/8/2011	11:36:48 AM	Helium MFC set to  0.000000
4/8/2011	11:36:48 AM	H2 MFC set to  0.000000
4/8/2011	11:36:48 AM	BCl3 MFC set to  0.000000
4/8/2011	11:36:48 AM	PHl3 MFC set to  0.000000
4/8/2011	11:36:48 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:36:48 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:36:48 AM	Tube furnace set to 0
4/8/2011	11:37:48 AM	H2 valve closed
4/8/2011	11:37:48 AM	BCl3 valve closed
4/8/2011	11:37:48 AM	PH3 valve closed
4/8/2011	11:37:48 AM	SiCl4 pre valve closed
4/8/2011	11:37:48 AM	SiCl4 post valve closed
4/8/2011	11:37:48 AM	Bubbler valve closed
4/8/2011	11:37:48 AM	Helium valve opened
4/8/2011	11:37:48 AM	Main Vac valve opened
4/8/2011	11:37:48 AM	Bypass valve opened
4/8/2011	11:37:48 AM	Helium MFC set to  100.000000
4/8/2011	11:37:48 AM	H2 MFC set to  0.000000
4/8/2011	11:37:48 AM	BCl3 MFC set to  0.000000
4/8/2011	11:37:48 AM	PHl3 MFC set to  0.000000
4/8/2011	11:37:48 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:37:48 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:37:48 AM	Tube furnace set to 0
4/8/2011	11:38:48 AM	Helium valve closed
4/8/2011	11:38:48 AM	H2 valve closed
4/8/2011	11:38:48 AM	BCl3 valve closed
4/8/2011	11:38:48 AM	PH3 valve closed
4/8/2011	11:38:48 AM	SiCl4 pre valve closed
4/8/2011	11:38:48 AM	SiCl4 post valve closed
4/8/2011	11:38:48 AM	Bubbler valve closed
4/8/2011	11:38:48 AM	Main Vac valve opened
4/8/2011	11:38:48 AM	Bypass valve opened
4/8/2011	11:38:48 AM	Helium MFC set to  0.000000
4/8/2011	11:38:48 AM	H2 MFC set to  0.000000
4/8/2011	11:38:48 AM	BCl3 MFC set to  0.000000
4/8/2011	11:38:48 AM	PHl3 MFC set to  0.000000
4/8/2011	11:38:48 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:38:48 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:38:48 AM	Tube furnace set to 0
4/8/2011	11:39:48 AM	H2 valve closed
4/8/2011	11:39:48 AM	BCl3 valve closed
4/8/2011	11:39:48 AM	PH3 valve closed
4/8/2011	11:39:48 AM	SiCl4 pre valve closed
4/8/2011	11:39:48 AM	SiCl4 post valve closed
4/8/2011	11:39:48 AM	Bubbler valve closed
4/8/2011	11:39:48 AM	Helium valve opened
4/8/2011	11:39:48 AM	Main Vac valve opened
4/8/2011	11:39:48 AM	Bypass valve opened
4/8/2011	11:39:48 AM	Helium MFC set to  100.000000
4/8/2011	11:39:48 AM	H2 MFC set to  0.000000
4/8/2011	11:39:48 AM	BCl3 MFC set to  0.000000
4/8/2011	11:39:48 AM	PHl3 MFC set to  0.000000
4/8/2011	11:39:48 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:39:48 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:39:48 AM	Tube furnace set to 0
4/8/2011	11:40:48 AM	Helium valve closed
4/8/2011	11:40:48 AM	H2 valve closed
4/8/2011	11:40:48 AM	BCl3 valve closed
4/8/2011	11:40:48 AM	PH3 valve closed
4/8/2011	11:40:48 AM	SiCl4 pre valve closed
4/8/2011	11:40:48 AM	SiCl4 post valve closed
4/8/2011	11:40:48 AM	Bubbler valve closed
4/8/2011	11:40:48 AM	Main Vac valve opened
4/8/2011	11:40:48 AM	Bypass valve opened
4/8/2011	11:40:48 AM	Helium MFC set to  0.000000
4/8/2011	11:40:48 AM	H2 MFC set to  0.000000
4/8/2011	11:40:48 AM	BCl3 MFC set to  0.000000
4/8/2011	11:40:48 AM	PHl3 MFC set to  0.000000
4/8/2011	11:40:48 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:40:48 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:40:48 AM	Tube furnace set to 0
4/8/2011	11:41:48 AM	H2 valve closed
4/8/2011	11:41:48 AM	BCl3 valve closed
4/8/2011	11:41:48 AM	PH3 valve closed
4/8/2011	11:41:48 AM	SiCl4 pre valve closed
4/8/2011	11:41:48 AM	SiCl4 post valve closed
4/8/2011	11:41:48 AM	Bubbler valve closed
4/8/2011	11:41:48 AM	Helium valve opened
4/8/2011	11:41:48 AM	Main Vac valve opened
4/8/2011	11:41:48 AM	Bypass valve opened
4/8/2011	11:41:48 AM	Helium MFC set to  100.000000
4/8/2011	11:41:48 AM	H2 MFC set to  0.000000
4/8/2011	11:41:48 AM	BCl3 MFC set to  0.000000
4/8/2011	11:41:48 AM	PHl3 MFC set to  0.000000
4/8/2011	11:41:48 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:41:48 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:41:49 AM	Tube furnace set to 0
4/8/2011	11:42:49 AM	Helium valve closed
4/8/2011	11:42:49 AM	H2 valve closed
4/8/2011	11:42:49 AM	BCl3 valve closed
4/8/2011	11:42:49 AM	PH3 valve closed
4/8/2011	11:42:49 AM	SiCl4 pre valve closed
4/8/2011	11:42:49 AM	SiCl4 post valve closed
4/8/2011	11:42:49 AM	Bubbler valve closed
4/8/2011	11:42:49 AM	Main Vac valve opened
4/8/2011	11:42:49 AM	Bypass valve opened
4/8/2011	11:42:49 AM	Helium MFC set to  0.000000
4/8/2011	11:42:49 AM	H2 MFC set to  0.000000
4/8/2011	11:42:49 AM	BCl3 MFC set to  0.000000
4/8/2011	11:42:49 AM	PHl3 MFC set to  0.000000
4/8/2011	11:42:49 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:42:49 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:42:49 AM	Tube furnace set to 0
4/8/2011	11:43:49 AM	H2 valve closed
4/8/2011	11:43:49 AM	BCl3 valve closed
4/8/2011	11:43:49 AM	PH3 valve closed
4/8/2011	11:43:49 AM	SiCl4 pre valve closed
4/8/2011	11:43:49 AM	SiCl4 post valve closed
4/8/2011	11:43:49 AM	Bubbler valve closed
4/8/2011	11:43:49 AM	Helium valve opened
4/8/2011	11:43:49 AM	Main Vac valve opened
4/8/2011	11:43:49 AM	Bypass valve opened
4/8/2011	11:43:49 AM	Helium MFC set to  100.000000
4/8/2011	11:43:49 AM	H2 MFC set to  0.000000
4/8/2011	11:43:49 AM	BCl3 MFC set to  0.000000
4/8/2011	11:43:49 AM	PHl3 MFC set to  0.000000
4/8/2011	11:43:49 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:43:49 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:43:49 AM	Tube furnace set to 0
4/8/2011	11:44:49 AM	Helium valve closed
4/8/2011	11:44:49 AM	H2 valve closed
4/8/2011	11:44:49 AM	BCl3 valve closed
4/8/2011	11:44:49 AM	PH3 valve closed
4/8/2011	11:44:49 AM	SiCl4 pre valve closed
4/8/2011	11:44:49 AM	SiCl4 post valve closed
4/8/2011	11:44:49 AM	Bubbler valve closed
4/8/2011	11:44:49 AM	Main Vac valve opened
4/8/2011	11:44:49 AM	Bypass valve opened
4/8/2011	11:44:49 AM	Helium MFC set to  0.000000
4/8/2011	11:44:49 AM	H2 MFC set to  0.000000
4/8/2011	11:44:49 AM	BCl3 MFC set to  0.000000
4/8/2011	11:44:49 AM	PHl3 MFC set to  0.000000
4/8/2011	11:44:49 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:44:49 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:44:49 AM	Tube furnace set to 0
4/8/2011	11:45:49 AM	H2 valve closed
4/8/2011	11:45:49 AM	BCl3 valve closed
4/8/2011	11:45:49 AM	PH3 valve closed
4/8/2011	11:45:49 AM	SiCl4 pre valve closed
4/8/2011	11:45:49 AM	SiCl4 post valve closed
4/8/2011	11:45:49 AM	Bubbler valve closed
4/8/2011	11:45:49 AM	Helium valve opened
4/8/2011	11:45:49 AM	Main Vac valve opened
4/8/2011	11:45:49 AM	Bypass valve opened
4/8/2011	11:45:49 AM	Helium MFC set to  100.000000
4/8/2011	11:45:49 AM	H2 MFC set to  0.000000
4/8/2011	11:45:49 AM	BCl3 MFC set to  0.000000
4/8/2011	11:45:49 AM	PHl3 MFC set to  0.000000
4/8/2011	11:45:49 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:45:49 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:45:49 AM	Tube furnace set to 0
4/8/2011	11:46:49 AM	Helium valve closed
4/8/2011	11:46:49 AM	H2 valve closed
4/8/2011	11:46:49 AM	BCl3 valve closed
4/8/2011	11:46:49 AM	PH3 valve closed
4/8/2011	11:46:49 AM	SiCl4 pre valve closed
4/8/2011	11:46:49 AM	SiCl4 post valve closed
4/8/2011	11:46:49 AM	Bubbler valve closed
4/8/2011	11:46:49 AM	Main Vac valve opened
4/8/2011	11:46:49 AM	Bypass valve opened
4/8/2011	11:46:49 AM	Helium MFC set to  0.000000
4/8/2011	11:46:49 AM	H2 MFC set to  0.000000
4/8/2011	11:46:49 AM	BCl3 MFC set to  0.000000
4/8/2011	11:46:49 AM	PHl3 MFC set to  0.000000
4/8/2011	11:46:49 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:46:49 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:46:50 AM	Tube furnace set to 0
4/8/2011	11:47:50 AM	H2 valve closed
4/8/2011	11:47:50 AM	BCl3 valve closed
4/8/2011	11:47:50 AM	PH3 valve closed
4/8/2011	11:47:50 AM	SiCl4 pre valve closed
4/8/2011	11:47:50 AM	SiCl4 post valve closed
4/8/2011	11:47:50 AM	Bubbler valve closed
4/8/2011	11:47:50 AM	Helium valve opened
4/8/2011	11:47:50 AM	Main Vac valve opened
4/8/2011	11:47:50 AM	Bypass valve opened
4/8/2011	11:47:50 AM	Helium MFC set to  100.000000
4/8/2011	11:47:50 AM	H2 MFC set to  0.000000
4/8/2011	11:47:50 AM	BCl3 MFC set to  0.000000
4/8/2011	11:47:50 AM	PHl3 MFC set to  0.000000
4/8/2011	11:47:50 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:47:50 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:47:50 AM	Tube furnace set to 0
4/8/2011	11:48:50 AM	Helium valve closed
4/8/2011	11:48:50 AM	H2 valve closed
4/8/2011	11:48:50 AM	BCl3 valve closed
4/8/2011	11:48:50 AM	PH3 valve closed
4/8/2011	11:48:50 AM	SiCl4 pre valve closed
4/8/2011	11:48:50 AM	SiCl4 post valve closed
4/8/2011	11:48:50 AM	Bubbler valve closed
4/8/2011	11:48:50 AM	Main Vac valve opened
4/8/2011	11:48:50 AM	Bypass valve opened
4/8/2011	11:48:50 AM	Helium MFC set to  0.000000
4/8/2011	11:48:50 AM	H2 MFC set to  0.000000
4/8/2011	11:48:50 AM	BCl3 MFC set to  0.000000
4/8/2011	11:48:50 AM	PHl3 MFC set to  0.000000
4/8/2011	11:48:50 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:48:50 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:48:50 AM	Tube furnace set to 0
4/8/2011	11:49:50 AM	H2 valve closed
4/8/2011	11:49:50 AM	BCl3 valve closed
4/8/2011	11:49:50 AM	PH3 valve closed
4/8/2011	11:49:50 AM	SiCl4 pre valve closed
4/8/2011	11:49:50 AM	SiCl4 post valve closed
4/8/2011	11:49:50 AM	Bubbler valve closed
4/8/2011	11:49:50 AM	Helium valve opened
4/8/2011	11:49:50 AM	Main Vac valve opened
4/8/2011	11:49:50 AM	Bypass valve opened
4/8/2011	11:49:50 AM	Helium MFC set to  100.000000
4/8/2011	11:49:50 AM	H2 MFC set to  0.000000
4/8/2011	11:49:50 AM	BCl3 MFC set to  0.000000
4/8/2011	11:49:50 AM	PHl3 MFC set to  0.000000
4/8/2011	11:49:50 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:49:50 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:49:50 AM	Tube furnace set to 0
4/8/2011	11:50:50 AM	Helium valve closed
4/8/2011	11:50:50 AM	H2 valve closed
4/8/2011	11:50:50 AM	BCl3 valve closed
4/8/2011	11:50:50 AM	PH3 valve closed
4/8/2011	11:50:50 AM	SiCl4 pre valve closed
4/8/2011	11:50:50 AM	SiCl4 post valve closed
4/8/2011	11:50:50 AM	Bubbler valve closed
4/8/2011	11:50:50 AM	Main Vac valve opened
4/8/2011	11:50:50 AM	Bypass valve opened
4/8/2011	11:50:50 AM	Helium MFC set to  0.000000
4/8/2011	11:50:50 AM	H2 MFC set to  0.000000
4/8/2011	11:50:50 AM	BCl3 MFC set to  0.000000
4/8/2011	11:50:50 AM	PHl3 MFC set to  0.000000
4/8/2011	11:50:50 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:50:50 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:50:50 AM	Tube furnace set to 0
4/8/2011	11:51:50 AM	H2 valve closed
4/8/2011	11:51:50 AM	BCl3 valve closed
4/8/2011	11:51:50 AM	PH3 valve closed
4/8/2011	11:51:50 AM	SiCl4 pre valve closed
4/8/2011	11:51:50 AM	SiCl4 post valve closed
4/8/2011	11:51:50 AM	Bubbler valve closed
4/8/2011	11:51:50 AM	Helium valve opened
4/8/2011	11:51:50 AM	Main Vac valve opened
4/8/2011	11:51:50 AM	Bypass valve opened
4/8/2011	11:51:50 AM	Helium MFC set to  100.000000
4/8/2011	11:51:50 AM	H2 MFC set to  0.000000
4/8/2011	11:51:50 AM	BCl3 MFC set to  0.000000
4/8/2011	11:51:50 AM	PHl3 MFC set to  0.000000
4/8/2011	11:51:50 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:51:50 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:51:51 AM	Tube furnace set to 0
4/8/2011	11:52:51 AM	Helium valve closed
4/8/2011	11:52:51 AM	H2 valve closed
4/8/2011	11:52:51 AM	BCl3 valve closed
4/8/2011	11:52:51 AM	PH3 valve closed
4/8/2011	11:52:51 AM	SiCl4 pre valve closed
4/8/2011	11:52:51 AM	SiCl4 post valve closed
4/8/2011	11:52:51 AM	Bubbler valve closed
4/8/2011	11:52:51 AM	Main Vac valve opened
4/8/2011	11:52:51 AM	Bypass valve opened
4/8/2011	11:52:51 AM	Helium MFC set to  0.000000
4/8/2011	11:52:51 AM	H2 MFC set to  0.000000
4/8/2011	11:52:51 AM	BCl3 MFC set to  0.000000
4/8/2011	11:52:51 AM	PHl3 MFC set to  0.000000
4/8/2011	11:52:51 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:52:51 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:52:51 AM	Tube furnace set to 0
4/8/2011	11:53:51 AM	H2 valve closed
4/8/2011	11:53:51 AM	BCl3 valve closed
4/8/2011	11:53:51 AM	PH3 valve closed
4/8/2011	11:53:51 AM	SiCl4 pre valve closed
4/8/2011	11:53:51 AM	SiCl4 post valve closed
4/8/2011	11:53:51 AM	Bubbler valve closed
4/8/2011	11:53:51 AM	Helium valve opened
4/8/2011	11:53:51 AM	Main Vac valve opened
4/8/2011	11:53:51 AM	Bypass valve opened
4/8/2011	11:53:51 AM	Helium MFC set to  100.000000
4/8/2011	11:53:51 AM	H2 MFC set to  0.000000
4/8/2011	11:53:51 AM	BCl3 MFC set to  0.000000
4/8/2011	11:53:51 AM	PHl3 MFC set to  0.000000
4/8/2011	11:53:51 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:53:51 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:53:51 AM	Tube furnace set to 0
4/8/2011	11:54:51 AM	Helium valve closed
4/8/2011	11:54:51 AM	H2 valve closed
4/8/2011	11:54:51 AM	BCl3 valve closed
4/8/2011	11:54:51 AM	PH3 valve closed
4/8/2011	11:54:51 AM	SiCl4 pre valve closed
4/8/2011	11:54:51 AM	SiCl4 post valve closed
4/8/2011	11:54:51 AM	Bubbler valve closed
4/8/2011	11:54:51 AM	Main Vac valve opened
4/8/2011	11:54:51 AM	Bypass valve opened
4/8/2011	11:54:51 AM	Helium MFC set to  0.000000
4/8/2011	11:54:51 AM	H2 MFC set to  0.000000
4/8/2011	11:54:51 AM	BCl3 MFC set to  0.000000
4/8/2011	11:54:51 AM	PHl3 MFC set to  0.000000
4/8/2011	11:54:51 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:54:51 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:54:51 AM	Tube furnace set to 0
4/8/2011	11:55:51 AM	H2 valve closed
4/8/2011	11:55:51 AM	BCl3 valve closed
4/8/2011	11:55:51 AM	PH3 valve closed
4/8/2011	11:55:51 AM	SiCl4 pre valve closed
4/8/2011	11:55:51 AM	SiCl4 post valve closed
4/8/2011	11:55:51 AM	Bubbler valve closed
4/8/2011	11:55:51 AM	Helium valve opened
4/8/2011	11:55:51 AM	Main Vac valve opened
4/8/2011	11:55:51 AM	Bypass valve opened
4/8/2011	11:55:51 AM	Helium MFC set to  100.000000
4/8/2011	11:55:51 AM	H2 MFC set to  0.000000
4/8/2011	11:55:51 AM	BCl3 MFC set to  0.000000
4/8/2011	11:55:51 AM	PHl3 MFC set to  0.000000
4/8/2011	11:55:51 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:55:51 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:55:51 AM	Tube furnace set to 0
4/8/2011	11:56:51 AM	Helium valve closed
4/8/2011	11:56:51 AM	H2 valve closed
4/8/2011	11:56:51 AM	BCl3 valve closed
4/8/2011	11:56:51 AM	PH3 valve closed
4/8/2011	11:56:51 AM	SiCl4 pre valve closed
4/8/2011	11:56:51 AM	SiCl4 post valve closed
4/8/2011	11:56:51 AM	Bubbler valve closed
4/8/2011	11:56:51 AM	Main Vac valve opened
4/8/2011	11:56:51 AM	Bypass valve opened
4/8/2011	11:56:51 AM	Helium MFC set to  0.000000
4/8/2011	11:56:51 AM	H2 MFC set to  0.000000
4/8/2011	11:56:51 AM	BCl3 MFC set to  0.000000
4/8/2011	11:56:51 AM	PHl3 MFC set to  0.000000
4/8/2011	11:56:51 AM	SiCl4 MFC set to  0.000000
4/8/2011	11:56:51 AM	Bypass solenoid MFC set to  0.000000
4/8/2011	11:56:52 AM	Tube furnace set to 0
4/8/2011	11:56:53 AM	Run finished at 11:56 AM
4/8/2011	11:56:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/8/2011	12:12:42 PM	Helium valve opened
4/8/2011	12:12:49 PM	Helium MFC set to  100.000000
4/8/2011	12:13:45 PM	Helium MFC set to  0.000000
4/8/2011	12:13:47 PM	Helium valve closed
4/8/2011	12:15:46 PM	Recipe started at 12:15 PM
4/8/2011	12:15:46 PM	Helium valve closed
4/8/2011	12:15:46 PM	BCl3 valve closed
4/8/2011	12:15:46 PM	PH3 valve closed
4/8/2011	12:15:46 PM	SiCl4 pre valve closed
4/8/2011	12:15:46 PM	SiCl4 post valve closed
4/8/2011	12:15:46 PM	Main Vac valve closed
4/8/2011	12:15:46 PM	Bypass valve closed
4/8/2011	12:15:46 PM	Bubbler valve closed
4/8/2011	12:15:46 PM	H2 valve opened
4/8/2011	12:15:46 PM	Helium MFC set to  0.000000
4/8/2011	12:15:46 PM	H2 MFC set to  500.000000
4/8/2011	12:15:46 PM	BCl3 MFC set to  0.000000
4/8/2011	12:15:46 PM	PHl3 MFC set to  0.000000
4/8/2011	12:15:46 PM	SiCl4 MFC set to  0.000000
4/8/2011	12:15:46 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	12:15:46 PM	Tube furnace set to 0
4/8/2011	12:17:06 PM	Helium valve closed
4/8/2011	12:17:06 PM	BCl3 valve closed
4/8/2011	12:17:06 PM	PH3 valve closed
4/8/2011	12:17:06 PM	SiCl4 pre valve closed
4/8/2011	12:17:06 PM	SiCl4 post valve closed
4/8/2011	12:17:06 PM	Main Vac valve closed
4/8/2011	12:17:06 PM	Bypass valve closed
4/8/2011	12:17:06 PM	H2 valve opened
4/8/2011	12:17:06 PM	Bubbler valve opened
4/8/2011	12:17:06 PM	Helium MFC set to  0.000000
4/8/2011	12:17:06 PM	H2 MFC set to  500.000000
4/8/2011	12:17:06 PM	BCl3 MFC set to  0.000000
4/8/2011	12:17:06 PM	PHl3 MFC set to  0.000000
4/8/2011	12:17:06 PM	SiCl4 MFC set to  0.000000
4/8/2011	12:17:06 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	12:17:06 PM	Tube furnace set to 1050
4/8/2011	12:37:06 PM	Helium valve closed
4/8/2011	12:37:06 PM	BCl3 valve closed
4/8/2011	12:37:06 PM	PH3 valve closed
4/8/2011	12:37:06 PM	SiCl4 pre valve closed
4/8/2011	12:37:06 PM	SiCl4 post valve closed
4/8/2011	12:37:06 PM	Main Vac valve closed
4/8/2011	12:37:06 PM	Bypass valve closed
4/8/2011	12:37:06 PM	H2 valve opened
4/8/2011	12:37:06 PM	Bubbler valve opened
4/8/2011	12:37:06 PM	Helium MFC set to  0.000000
4/8/2011	12:37:06 PM	H2 MFC set to  500.000000
4/8/2011	12:37:06 PM	BCl3 MFC set to  0.000000
4/8/2011	12:37:06 PM	PHl3 MFC set to  0.000000
4/8/2011	12:37:06 PM	SiCl4 MFC set to  0.000000
4/8/2011	12:37:06 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	12:37:06 PM	Tube furnace set to 1050
4/8/2011	12:37:08 PM	H2 valve closed
4/8/2011	12:37:08 PM	BCl3 valve closed
4/8/2011	12:37:08 PM	PH3 valve closed
4/8/2011	12:37:08 PM	SiCl4 pre valve closed
4/8/2011	12:37:08 PM	SiCl4 post valve closed
4/8/2011	12:37:08 PM	Main Vac valve closed
4/8/2011	12:37:08 PM	Bypass valve closed
4/8/2011	12:37:08 PM	Helium valve opened
4/8/2011	12:37:08 PM	Bubbler valve opened
4/8/2011	12:37:08 PM	Helium MFC set to  500.000000
4/8/2011	12:37:08 PM	H2 MFC set to  0.000000
4/8/2011	12:37:08 PM	BCl3 MFC set to  0.000000
4/8/2011	12:37:08 PM	PHl3 MFC set to  0.000000
4/8/2011	12:37:08 PM	SiCl4 MFC set to  0.000000
4/8/2011	12:37:08 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	12:37:08 PM	Tube furnace set to 0
4/8/2011	12:57:08 PM	Helium valve closed
4/8/2011	12:57:08 PM	H2 valve closed
4/8/2011	12:57:08 PM	BCl3 valve closed
4/8/2011	12:57:08 PM	PH3 valve closed
4/8/2011	12:57:08 PM	SiCl4 pre valve closed
4/8/2011	12:57:08 PM	SiCl4 post valve closed
4/8/2011	12:57:08 PM	Main Vac valve closed
4/8/2011	12:57:08 PM	Bypass valve closed
4/8/2011	12:57:08 PM	Bubbler valve closed
4/8/2011	12:57:08 PM	Helium MFC set to  0.000000
4/8/2011	12:57:08 PM	H2 MFC set to  0.000000
4/8/2011	12:57:08 PM	BCl3 MFC set to  0.000000
4/8/2011	12:57:08 PM	PHl3 MFC set to  0.000000
4/8/2011	12:57:08 PM	SiCl4 MFC set to  0.000000
4/8/2011	12:57:08 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	12:57:08 PM	Tube furnace set to 0
4/8/2011	12:57:08 PM	Run finished at 12:57 PM
4/8/2011	1:55:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2011	1:55:11 PM	Recipe started at 1:55 PM
4/8/2011	1:55:11 PM	Helium valve closed
4/8/2011	1:55:11 PM	H2 valve closed
4/8/2011	1:55:11 PM	BCl3 valve closed
4/8/2011	1:55:11 PM	PH3 valve closed
4/8/2011	1:55:11 PM	SiCl4 pre valve closed
4/8/2011	1:55:11 PM	SiCl4 post valve closed
4/8/2011	1:55:11 PM	Main Vac valve closed
4/8/2011	1:55:11 PM	Bubbler valve closed
4/8/2011	1:55:11 PM	Bypass valve opened
4/8/2011	1:55:11 PM	Helium MFC set to  0.000000
4/8/2011	1:55:11 PM	H2 MFC set to  0.000000
4/8/2011	1:55:11 PM	BCl3 MFC set to  0.000000
4/8/2011	1:55:11 PM	PHl3 MFC set to  0.000000
4/8/2011	1:55:11 PM	SiCl4 MFC set to  0.000000
4/8/2011	1:55:11 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	1:55:11 PM	Tube furnace set to 0
4/8/2011	1:55:41 PM	Helium valve closed
4/8/2011	1:55:41 PM	H2 valve closed
4/8/2011	1:55:41 PM	BCl3 valve closed
4/8/2011	1:55:41 PM	PH3 valve closed
4/8/2011	1:55:41 PM	SiCl4 pre valve closed
4/8/2011	1:55:41 PM	SiCl4 post valve closed
4/8/2011	1:55:41 PM	Bubbler valve closed
4/8/2011	1:55:41 PM	Main Vac valve opened
4/8/2011	1:55:41 PM	Bypass valve opened
4/8/2011	1:55:41 PM	Helium MFC set to  0.000000
4/8/2011	1:55:41 PM	H2 MFC set to  0.000000
4/8/2011	1:55:41 PM	BCl3 MFC set to  0.000000
4/8/2011	1:55:41 PM	PHl3 MFC set to  0.000000
4/8/2011	1:55:41 PM	SiCl4 MFC set to  0.000000
4/8/2011	1:55:41 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	1:55:41 PM	Tube furnace set to 0
4/8/2011	1:55:42 PM	Run finished at 1:55 PM
4/8/2011	1:55:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2011	1:56:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/8/2011	1:56:37 PM	Recipe started at 1:56 PM
4/8/2011	1:56:37 PM	Helium valve closed
4/8/2011	1:56:37 PM	H2 valve closed
4/8/2011	1:56:37 PM	BCl3 valve closed
4/8/2011	1:56:37 PM	PH3 valve closed
4/8/2011	1:56:37 PM	SiCl4 pre valve closed
4/8/2011	1:56:37 PM	SiCl4 post valve closed
4/8/2011	1:56:37 PM	Main Vac valve closed
4/8/2011	1:56:37 PM	Bubbler valve closed
4/8/2011	1:56:37 PM	Bypass valve opened
4/8/2011	1:56:37 PM	Helium MFC set to  0.000000
4/8/2011	1:56:37 PM	H2 MFC set to  0.000000
4/8/2011	1:56:37 PM	BCl3 MFC set to  0.000000
4/8/2011	1:56:37 PM	PHl3 MFC set to  0.000000
4/8/2011	1:56:37 PM	SiCl4 MFC set to  0.000000
4/8/2011	1:56:37 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	1:56:38 PM	Tube furnace set to 0
4/8/2011	1:56:38 PM	Helium valve closed
4/8/2011	1:56:38 PM	H2 valve closed
4/8/2011	1:56:38 PM	BCl3 valve closed
4/8/2011	1:56:38 PM	PH3 valve closed
4/8/2011	1:56:38 PM	SiCl4 pre valve closed
4/8/2011	1:56:38 PM	SiCl4 post valve closed
4/8/2011	1:56:38 PM	Bubbler valve closed
4/8/2011	1:56:38 PM	Main Vac valve opened
4/8/2011	1:56:38 PM	Bypass valve opened
4/8/2011	1:56:38 PM	Helium MFC set to  0.000000
4/8/2011	1:56:38 PM	H2 MFC set to  0.000000
4/8/2011	1:56:38 PM	BCl3 MFC set to  0.000000
4/8/2011	1:56:38 PM	PHl3 MFC set to  0.000000
4/8/2011	1:56:38 PM	SiCl4 MFC set to  0.000000
4/8/2011	1:56:38 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	1:56:38 PM	Tube furnace set to 0
4/8/2011	1:57:38 PM	H2 valve closed
4/8/2011	1:57:38 PM	BCl3 valve closed
4/8/2011	1:57:38 PM	PH3 valve closed
4/8/2011	1:57:38 PM	SiCl4 pre valve closed
4/8/2011	1:57:38 PM	SiCl4 post valve closed
4/8/2011	1:57:38 PM	Bubbler valve closed
4/8/2011	1:57:38 PM	Helium valve opened
4/8/2011	1:57:38 PM	Main Vac valve opened
4/8/2011	1:57:38 PM	Bypass valve opened
4/8/2011	1:57:38 PM	Helium MFC set to  100.000000
4/8/2011	1:57:38 PM	H2 MFC set to  0.000000
4/8/2011	1:57:38 PM	BCl3 MFC set to  0.000000
4/8/2011	1:57:38 PM	PHl3 MFC set to  0.000000
4/8/2011	1:57:38 PM	SiCl4 MFC set to  0.000000
4/8/2011	1:57:38 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	1:57:38 PM	Tube furnace set to 0
4/8/2011	1:58:38 PM	Helium valve closed
4/8/2011	1:58:38 PM	H2 valve closed
4/8/2011	1:58:38 PM	BCl3 valve closed
4/8/2011	1:58:38 PM	PH3 valve closed
4/8/2011	1:58:38 PM	SiCl4 pre valve closed
4/8/2011	1:58:38 PM	SiCl4 post valve closed
4/8/2011	1:58:38 PM	Bubbler valve closed
4/8/2011	1:58:38 PM	Main Vac valve opened
4/8/2011	1:58:38 PM	Bypass valve opened
4/8/2011	1:58:38 PM	Helium MFC set to  0.000000
4/8/2011	1:58:38 PM	H2 MFC set to  0.000000
4/8/2011	1:58:38 PM	BCl3 MFC set to  0.000000
4/8/2011	1:58:38 PM	PHl3 MFC set to  0.000000
4/8/2011	1:58:38 PM	SiCl4 MFC set to  0.000000
4/8/2011	1:58:38 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	1:58:38 PM	Tube furnace set to 0
4/8/2011	1:59:38 PM	H2 valve closed
4/8/2011	1:59:38 PM	BCl3 valve closed
4/8/2011	1:59:38 PM	PH3 valve closed
4/8/2011	1:59:38 PM	SiCl4 pre valve closed
4/8/2011	1:59:38 PM	SiCl4 post valve closed
4/8/2011	1:59:38 PM	Bubbler valve closed
4/8/2011	1:59:38 PM	Helium valve opened
4/8/2011	1:59:38 PM	Main Vac valve opened
4/8/2011	1:59:38 PM	Bypass valve opened
4/8/2011	1:59:38 PM	Helium MFC set to  100.000000
4/8/2011	1:59:38 PM	H2 MFC set to  0.000000
4/8/2011	1:59:38 PM	BCl3 MFC set to  0.000000
4/8/2011	1:59:38 PM	PHl3 MFC set to  0.000000
4/8/2011	1:59:38 PM	SiCl4 MFC set to  0.000000
4/8/2011	1:59:38 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	1:59:39 PM	Tube furnace set to 0
4/8/2011	2:00:39 PM	Helium valve closed
4/8/2011	2:00:39 PM	H2 valve closed
4/8/2011	2:00:39 PM	BCl3 valve closed
4/8/2011	2:00:39 PM	PH3 valve closed
4/8/2011	2:00:39 PM	SiCl4 pre valve closed
4/8/2011	2:00:39 PM	SiCl4 post valve closed
4/8/2011	2:00:39 PM	Bubbler valve closed
4/8/2011	2:00:39 PM	Main Vac valve opened
4/8/2011	2:00:39 PM	Bypass valve opened
4/8/2011	2:00:39 PM	Helium MFC set to  0.000000
4/8/2011	2:00:39 PM	H2 MFC set to  0.000000
4/8/2011	2:00:39 PM	BCl3 MFC set to  0.000000
4/8/2011	2:00:39 PM	PHl3 MFC set to  0.000000
4/8/2011	2:00:39 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:00:39 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:00:39 PM	Tube furnace set to 0
4/8/2011	2:01:39 PM	H2 valve closed
4/8/2011	2:01:39 PM	BCl3 valve closed
4/8/2011	2:01:39 PM	PH3 valve closed
4/8/2011	2:01:39 PM	SiCl4 pre valve closed
4/8/2011	2:01:39 PM	SiCl4 post valve closed
4/8/2011	2:01:39 PM	Bubbler valve closed
4/8/2011	2:01:39 PM	Helium valve opened
4/8/2011	2:01:39 PM	Main Vac valve opened
4/8/2011	2:01:39 PM	Bypass valve opened
4/8/2011	2:01:39 PM	Helium MFC set to  100.000000
4/8/2011	2:01:39 PM	H2 MFC set to  0.000000
4/8/2011	2:01:39 PM	BCl3 MFC set to  0.000000
4/8/2011	2:01:39 PM	PHl3 MFC set to  0.000000
4/8/2011	2:01:39 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:01:39 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:01:39 PM	Tube furnace set to 0
4/8/2011	2:02:39 PM	Helium valve closed
4/8/2011	2:02:39 PM	H2 valve closed
4/8/2011	2:02:39 PM	BCl3 valve closed
4/8/2011	2:02:39 PM	PH3 valve closed
4/8/2011	2:02:39 PM	SiCl4 pre valve closed
4/8/2011	2:02:39 PM	SiCl4 post valve closed
4/8/2011	2:02:39 PM	Bubbler valve closed
4/8/2011	2:02:39 PM	Main Vac valve opened
4/8/2011	2:02:39 PM	Bypass valve opened
4/8/2011	2:02:39 PM	Helium MFC set to  0.000000
4/8/2011	2:02:39 PM	H2 MFC set to  0.000000
4/8/2011	2:02:39 PM	BCl3 MFC set to  0.000000
4/8/2011	2:02:39 PM	PHl3 MFC set to  0.000000
4/8/2011	2:02:39 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:02:39 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:02:39 PM	Tube furnace set to 0
4/8/2011	2:03:39 PM	H2 valve closed
4/8/2011	2:03:39 PM	BCl3 valve closed
4/8/2011	2:03:39 PM	PH3 valve closed
4/8/2011	2:03:39 PM	SiCl4 pre valve closed
4/8/2011	2:03:39 PM	SiCl4 post valve closed
4/8/2011	2:03:39 PM	Bubbler valve closed
4/8/2011	2:03:39 PM	Helium valve opened
4/8/2011	2:03:39 PM	Main Vac valve opened
4/8/2011	2:03:39 PM	Bypass valve opened
4/8/2011	2:03:39 PM	Helium MFC set to  100.000000
4/8/2011	2:03:39 PM	H2 MFC set to  0.000000
4/8/2011	2:03:39 PM	BCl3 MFC set to  0.000000
4/8/2011	2:03:39 PM	PHl3 MFC set to  0.000000
4/8/2011	2:03:39 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:03:39 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:03:39 PM	Tube furnace set to 0
4/8/2011	2:04:39 PM	Helium valve closed
4/8/2011	2:04:39 PM	H2 valve closed
4/8/2011	2:04:39 PM	BCl3 valve closed
4/8/2011	2:04:39 PM	PH3 valve closed
4/8/2011	2:04:39 PM	SiCl4 pre valve closed
4/8/2011	2:04:39 PM	SiCl4 post valve closed
4/8/2011	2:04:39 PM	Bubbler valve closed
4/8/2011	2:04:39 PM	Main Vac valve opened
4/8/2011	2:04:39 PM	Bypass valve opened
4/8/2011	2:04:39 PM	Helium MFC set to  0.000000
4/8/2011	2:04:39 PM	H2 MFC set to  0.000000
4/8/2011	2:04:39 PM	BCl3 MFC set to  0.000000
4/8/2011	2:04:39 PM	PHl3 MFC set to  0.000000
4/8/2011	2:04:39 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:04:39 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:04:40 PM	Tube furnace set to 0
4/8/2011	2:05:40 PM	H2 valve closed
4/8/2011	2:05:40 PM	BCl3 valve closed
4/8/2011	2:05:40 PM	PH3 valve closed
4/8/2011	2:05:40 PM	SiCl4 pre valve closed
4/8/2011	2:05:40 PM	SiCl4 post valve closed
4/8/2011	2:05:40 PM	Bubbler valve closed
4/8/2011	2:05:40 PM	Helium valve opened
4/8/2011	2:05:40 PM	Main Vac valve opened
4/8/2011	2:05:40 PM	Bypass valve opened
4/8/2011	2:05:40 PM	Helium MFC set to  100.000000
4/8/2011	2:05:40 PM	H2 MFC set to  0.000000
4/8/2011	2:05:40 PM	BCl3 MFC set to  0.000000
4/8/2011	2:05:40 PM	PHl3 MFC set to  0.000000
4/8/2011	2:05:40 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:05:40 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:05:40 PM	Tube furnace set to 0
4/8/2011	2:06:40 PM	Helium valve closed
4/8/2011	2:06:40 PM	H2 valve closed
4/8/2011	2:06:40 PM	BCl3 valve closed
4/8/2011	2:06:40 PM	PH3 valve closed
4/8/2011	2:06:40 PM	SiCl4 pre valve closed
4/8/2011	2:06:40 PM	SiCl4 post valve closed
4/8/2011	2:06:40 PM	Bubbler valve closed
4/8/2011	2:06:40 PM	Main Vac valve opened
4/8/2011	2:06:40 PM	Bypass valve opened
4/8/2011	2:06:40 PM	Helium MFC set to  0.000000
4/8/2011	2:06:40 PM	H2 MFC set to  0.000000
4/8/2011	2:06:40 PM	BCl3 MFC set to  0.000000
4/8/2011	2:06:40 PM	PHl3 MFC set to  0.000000
4/8/2011	2:06:40 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:06:40 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:06:40 PM	Tube furnace set to 0
4/8/2011	2:07:40 PM	H2 valve closed
4/8/2011	2:07:40 PM	BCl3 valve closed
4/8/2011	2:07:40 PM	PH3 valve closed
4/8/2011	2:07:40 PM	SiCl4 pre valve closed
4/8/2011	2:07:40 PM	SiCl4 post valve closed
4/8/2011	2:07:40 PM	Bubbler valve closed
4/8/2011	2:07:40 PM	Helium valve opened
4/8/2011	2:07:40 PM	Main Vac valve opened
4/8/2011	2:07:40 PM	Bypass valve opened
4/8/2011	2:07:40 PM	Helium MFC set to  100.000000
4/8/2011	2:07:40 PM	H2 MFC set to  0.000000
4/8/2011	2:07:40 PM	BCl3 MFC set to  0.000000
4/8/2011	2:07:40 PM	PHl3 MFC set to  0.000000
4/8/2011	2:07:40 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:07:40 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:07:40 PM	Tube furnace set to 0
4/8/2011	2:08:40 PM	Helium valve closed
4/8/2011	2:08:40 PM	H2 valve closed
4/8/2011	2:08:40 PM	BCl3 valve closed
4/8/2011	2:08:40 PM	PH3 valve closed
4/8/2011	2:08:40 PM	SiCl4 pre valve closed
4/8/2011	2:08:40 PM	SiCl4 post valve closed
4/8/2011	2:08:40 PM	Bubbler valve closed
4/8/2011	2:08:40 PM	Main Vac valve opened
4/8/2011	2:08:40 PM	Bypass valve opened
4/8/2011	2:08:40 PM	Helium MFC set to  0.000000
4/8/2011	2:08:40 PM	H2 MFC set to  0.000000
4/8/2011	2:08:40 PM	BCl3 MFC set to  0.000000
4/8/2011	2:08:40 PM	PHl3 MFC set to  0.000000
4/8/2011	2:08:40 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:08:40 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:08:40 PM	Tube furnace set to 0
4/8/2011	2:09:40 PM	H2 valve closed
4/8/2011	2:09:40 PM	BCl3 valve closed
4/8/2011	2:09:40 PM	PH3 valve closed
4/8/2011	2:09:40 PM	SiCl4 pre valve closed
4/8/2011	2:09:40 PM	SiCl4 post valve closed
4/8/2011	2:09:40 PM	Bubbler valve closed
4/8/2011	2:09:40 PM	Helium valve opened
4/8/2011	2:09:40 PM	Main Vac valve opened
4/8/2011	2:09:40 PM	Bypass valve opened
4/8/2011	2:09:40 PM	Helium MFC set to  100.000000
4/8/2011	2:09:40 PM	H2 MFC set to  0.000000
4/8/2011	2:09:40 PM	BCl3 MFC set to  0.000000
4/8/2011	2:09:40 PM	PHl3 MFC set to  0.000000
4/8/2011	2:09:40 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:09:40 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:09:41 PM	Tube furnace set to 0
4/8/2011	2:10:41 PM	Helium valve closed
4/8/2011	2:10:41 PM	H2 valve closed
4/8/2011	2:10:41 PM	BCl3 valve closed
4/8/2011	2:10:41 PM	PH3 valve closed
4/8/2011	2:10:41 PM	SiCl4 pre valve closed
4/8/2011	2:10:41 PM	SiCl4 post valve closed
4/8/2011	2:10:41 PM	Bubbler valve closed
4/8/2011	2:10:41 PM	Main Vac valve opened
4/8/2011	2:10:41 PM	Bypass valve opened
4/8/2011	2:10:41 PM	Helium MFC set to  0.000000
4/8/2011	2:10:41 PM	H2 MFC set to  0.000000
4/8/2011	2:10:41 PM	BCl3 MFC set to  0.000000
4/8/2011	2:10:41 PM	PHl3 MFC set to  0.000000
4/8/2011	2:10:41 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:10:41 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:10:41 PM	Tube furnace set to 0
4/8/2011	2:11:41 PM	H2 valve closed
4/8/2011	2:11:41 PM	BCl3 valve closed
4/8/2011	2:11:41 PM	PH3 valve closed
4/8/2011	2:11:41 PM	SiCl4 pre valve closed
4/8/2011	2:11:41 PM	SiCl4 post valve closed
4/8/2011	2:11:41 PM	Bubbler valve closed
4/8/2011	2:11:41 PM	Helium valve opened
4/8/2011	2:11:41 PM	Main Vac valve opened
4/8/2011	2:11:41 PM	Bypass valve opened
4/8/2011	2:11:41 PM	Helium MFC set to  100.000000
4/8/2011	2:11:41 PM	H2 MFC set to  0.000000
4/8/2011	2:11:41 PM	BCl3 MFC set to  0.000000
4/8/2011	2:11:41 PM	PHl3 MFC set to  0.000000
4/8/2011	2:11:41 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:11:41 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:11:41 PM	Tube furnace set to 0
4/8/2011	2:12:41 PM	Helium valve closed
4/8/2011	2:12:41 PM	H2 valve closed
4/8/2011	2:12:41 PM	BCl3 valve closed
4/8/2011	2:12:41 PM	PH3 valve closed
4/8/2011	2:12:41 PM	SiCl4 pre valve closed
4/8/2011	2:12:41 PM	SiCl4 post valve closed
4/8/2011	2:12:41 PM	Bubbler valve closed
4/8/2011	2:12:41 PM	Main Vac valve opened
4/8/2011	2:12:41 PM	Bypass valve opened
4/8/2011	2:12:41 PM	Helium MFC set to  0.000000
4/8/2011	2:12:41 PM	H2 MFC set to  0.000000
4/8/2011	2:12:41 PM	BCl3 MFC set to  0.000000
4/8/2011	2:12:41 PM	PHl3 MFC set to  0.000000
4/8/2011	2:12:41 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:12:41 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:12:41 PM	Tube furnace set to 0
4/8/2011	2:13:41 PM	H2 valve closed
4/8/2011	2:13:41 PM	BCl3 valve closed
4/8/2011	2:13:41 PM	PH3 valve closed
4/8/2011	2:13:41 PM	SiCl4 pre valve closed
4/8/2011	2:13:41 PM	SiCl4 post valve closed
4/8/2011	2:13:41 PM	Bubbler valve closed
4/8/2011	2:13:41 PM	Helium valve opened
4/8/2011	2:13:41 PM	Main Vac valve opened
4/8/2011	2:13:41 PM	Bypass valve opened
4/8/2011	2:13:41 PM	Helium MFC set to  100.000000
4/8/2011	2:13:41 PM	H2 MFC set to  0.000000
4/8/2011	2:13:41 PM	BCl3 MFC set to  0.000000
4/8/2011	2:13:41 PM	PHl3 MFC set to  0.000000
4/8/2011	2:13:41 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:13:41 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:13:42 PM	Tube furnace set to 0
4/8/2011	2:14:42 PM	Helium valve closed
4/8/2011	2:14:42 PM	H2 valve closed
4/8/2011	2:14:42 PM	BCl3 valve closed
4/8/2011	2:14:42 PM	PH3 valve closed
4/8/2011	2:14:42 PM	SiCl4 pre valve closed
4/8/2011	2:14:42 PM	SiCl4 post valve closed
4/8/2011	2:14:42 PM	Bubbler valve closed
4/8/2011	2:14:42 PM	Main Vac valve opened
4/8/2011	2:14:42 PM	Bypass valve opened
4/8/2011	2:14:42 PM	Helium MFC set to  0.000000
4/8/2011	2:14:42 PM	H2 MFC set to  0.000000
4/8/2011	2:14:42 PM	BCl3 MFC set to  0.000000
4/8/2011	2:14:42 PM	PHl3 MFC set to  0.000000
4/8/2011	2:14:42 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:14:42 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:14:42 PM	Tube furnace set to 0
4/8/2011	2:15:42 PM	H2 valve closed
4/8/2011	2:15:42 PM	BCl3 valve closed
4/8/2011	2:15:42 PM	PH3 valve closed
4/8/2011	2:15:42 PM	SiCl4 pre valve closed
4/8/2011	2:15:42 PM	SiCl4 post valve closed
4/8/2011	2:15:42 PM	Bubbler valve closed
4/8/2011	2:15:42 PM	Helium valve opened
4/8/2011	2:15:42 PM	Main Vac valve opened
4/8/2011	2:15:42 PM	Bypass valve opened
4/8/2011	2:15:42 PM	Helium MFC set to  100.000000
4/8/2011	2:15:42 PM	H2 MFC set to  0.000000
4/8/2011	2:15:42 PM	BCl3 MFC set to  0.000000
4/8/2011	2:15:42 PM	PHl3 MFC set to  0.000000
4/8/2011	2:15:42 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:15:42 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:15:42 PM	Tube furnace set to 0
4/8/2011	2:16:42 PM	Helium valve closed
4/8/2011	2:16:42 PM	H2 valve closed
4/8/2011	2:16:42 PM	BCl3 valve closed
4/8/2011	2:16:42 PM	PH3 valve closed
4/8/2011	2:16:42 PM	SiCl4 pre valve closed
4/8/2011	2:16:42 PM	SiCl4 post valve closed
4/8/2011	2:16:42 PM	Bubbler valve closed
4/8/2011	2:16:42 PM	Main Vac valve opened
4/8/2011	2:16:42 PM	Bypass valve opened
4/8/2011	2:16:42 PM	Helium MFC set to  0.000000
4/8/2011	2:16:42 PM	H2 MFC set to  0.000000
4/8/2011	2:16:42 PM	BCl3 MFC set to  0.000000
4/8/2011	2:16:42 PM	PHl3 MFC set to  0.000000
4/8/2011	2:16:42 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:16:42 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:16:42 PM	Tube furnace set to 0
4/8/2011	2:16:43 PM	Run finished at 2:16 PM
4/8/2011	2:16:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/8/2011	2:27:07 PM	Helium valve opened
4/8/2011	2:27:10 PM	Helium MFC set to  100.000000
4/8/2011	2:27:53 PM	Helium MFC set to  0.000000
4/8/2011	2:27:55 PM	Helium valve closed
4/8/2011	2:29:15 PM	Recipe started at 2:29 PM
4/8/2011	2:29:15 PM	Helium valve closed
4/8/2011	2:29:15 PM	BCl3 valve closed
4/8/2011	2:29:15 PM	PH3 valve closed
4/8/2011	2:29:15 PM	SiCl4 pre valve closed
4/8/2011	2:29:15 PM	SiCl4 post valve closed
4/8/2011	2:29:15 PM	Main Vac valve closed
4/8/2011	2:29:15 PM	Bypass valve closed
4/8/2011	2:29:15 PM	Bubbler valve closed
4/8/2011	2:29:15 PM	H2 valve opened
4/8/2011	2:29:15 PM	Helium MFC set to  0.000000
4/8/2011	2:29:15 PM	H2 MFC set to  500.000000
4/8/2011	2:29:15 PM	BCl3 MFC set to  0.000000
4/8/2011	2:29:15 PM	PHl3 MFC set to  0.000000
4/8/2011	2:29:15 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:29:15 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:29:15 PM	Tube furnace set to 0
4/8/2011	2:30:34 PM	Helium valve closed
4/8/2011	2:30:34 PM	BCl3 valve closed
4/8/2011	2:30:34 PM	PH3 valve closed
4/8/2011	2:30:34 PM	SiCl4 pre valve closed
4/8/2011	2:30:34 PM	SiCl4 post valve closed
4/8/2011	2:30:34 PM	Main Vac valve closed
4/8/2011	2:30:34 PM	Bypass valve closed
4/8/2011	2:30:34 PM	H2 valve opened
4/8/2011	2:30:34 PM	Bubbler valve opened
4/8/2011	2:30:34 PM	Helium MFC set to  0.000000
4/8/2011	2:30:34 PM	H2 MFC set to  500.000000
4/8/2011	2:30:34 PM	BCl3 MFC set to  0.000000
4/8/2011	2:30:34 PM	PHl3 MFC set to  0.000000
4/8/2011	2:30:34 PM	SiCl4 MFC set to  0.000000
4/8/2011	2:30:34 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	2:30:34 PM	Tube furnace set to 1050
4/8/2011	2:50:34 PM	Helium valve closed
4/8/2011	2:50:34 PM	BCl3 valve closed
4/8/2011	2:50:34 PM	PH3 valve closed
4/8/2011	2:50:34 PM	SiCl4 pre valve closed
4/8/2011	2:50:34 PM	SiCl4 post valve closed
4/8/2011	2:50:34 PM	Main Vac valve closed
4/8/2011	2:50:34 PM	Bypass valve closed
4/8/2011	2:50:34 PM	H2 valve opened
4/8/2011	2:50:34 PM	Bubbler valve opened
4/8/2011	2:50:35 PM	Error setting the  Helium MFC to 0.000000
4/8/2011	3:53:08 PM	Error setting the  H2 MFC to 500.000000
4/8/2011	3:54:30 PM	Error setting the  BCl3 MFC to 0.000000
4/8/2011	3:54:31 PM	PHl3 MFC set to  0.000000
4/8/2011	3:54:31 PM	SiCl4 MFC set to  0.000000
4/8/2011	3:54:31 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	3:54:31 PM	Tube furnace set to 1050
4/8/2011	3:54:31 PM	H2 valve closed
4/8/2011	3:54:31 PM	BCl3 valve closed
4/8/2011	3:54:31 PM	PH3 valve closed
4/8/2011	3:54:31 PM	SiCl4 pre valve closed
4/8/2011	3:54:31 PM	SiCl4 post valve closed
4/8/2011	3:54:31 PM	Main Vac valve closed
4/8/2011	3:54:31 PM	Bypass valve closed
4/8/2011	3:54:31 PM	Helium valve opened
4/8/2011	3:54:31 PM	Bubbler valve opened
4/8/2011	3:54:31 PM	Error setting the  Helium MFC to 500.000000
4/8/2011	3:54:33 PM	Error setting the  H2 MFC to 0.000000
4/8/2011	3:54:34 PM	Error setting the  BCl3 MFC to 0.000000
4/8/2011	3:54:34 PM	PHl3 MFC set to  0.000000
4/8/2011	3:54:34 PM	SiCl4 MFC set to  0.000000
4/8/2011	3:54:34 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	3:54:34 PM	Tube furnace set to 0
4/8/2011	3:54:58 PM	Helium valve closed
4/8/2011	3:54:58 PM	H2 valve closed
4/8/2011	3:54:58 PM	BCl3 valve closed
4/8/2011	3:54:58 PM	PH3 valve closed
4/8/2011	3:54:58 PM	SiCl4 pre valve closed
4/8/2011	3:54:58 PM	SiCl4 post valve closed
4/8/2011	3:54:58 PM	Main Vac valve closed
4/8/2011	3:54:58 PM	Bubbler valve closed
4/8/2011	3:54:58 PM	Bypass valve closed
4/8/2011	3:54:58 PM	Error setting the  Helium MFC to 0.000000
4/8/2011	3:56:27 PM	Error setting the  H2 MFC to 0.000000
4/8/2011	3:56:32 PM	Error setting the  BCl3 MFC to 0.000000
4/8/2011	3:56:37 PM	PHl3 MFC set to  0.000000
4/8/2011	3:56:37 PM	SiCl4 MFC set to  0.000000
4/8/2011	3:56:37 PM	Bypass solenoid MFC set to  760.000000
4/8/2011	3:56:37 PM	Tube furnace set to 0
4/8/2011	3:56:37 PM	Baratron reads 749.484945 Torr and NaOH valve is open.  Emergency exit.
4/8/2011	3:56:45 PM	Run aborted at 3:56 PM
4/8/2011	4:05:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/8/2011	4:05:24 PM	Recipe started at 4:05 PM
4/8/2011	4:05:24 PM	Helium valve closed
4/8/2011	4:05:24 PM	H2 valve closed
4/8/2011	4:05:24 PM	BCl3 valve closed
4/8/2011	4:05:24 PM	PH3 valve closed
4/8/2011	4:05:24 PM	SiCl4 pre valve closed
4/8/2011	4:05:24 PM	SiCl4 post valve closed
4/8/2011	4:05:24 PM	Main Vac valve closed
4/8/2011	4:05:24 PM	Bypass valve closed
4/8/2011	4:05:24 PM	Bubbler valve closed
4/8/2011	4:05:24 PM	Error setting the  Helium MFC to 0.000000
4/8/2011	4:05:26 PM	Error setting the  H2 MFC to 0.000000
4/8/2011	4:05:28 PM	Error setting the  BCl3 MFC to 0.000000
4/8/2011	4:05:29 PM	PHl3 MFC set to  0.000000
4/8/2011	4:05:29 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:05:29 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:05:29 PM	Tube furnace set to 0
4/8/2011	4:05:29 PM	Run finished at 4:05 PM
4/8/2011	4:05:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/8/2011	4:05:44 PM	Program exited cleanly
4/8/2011	4:09:52 PM	Program started normally
4/8/2011	4:09:52 PM	Helium valve closed
4/8/2011	4:09:52 PM	H2 valve closed
4/8/2011	4:09:52 PM	BCl3 valve closed
4/8/2011	4:09:52 PM	PH3 valve closed
4/8/2011	4:09:52 PM	SiCl4 pre valve closed
4/8/2011	4:09:52 PM	SiCl4 post valve closed
4/8/2011	4:09:52 PM	Main Vac valve closed
4/8/2011	4:09:52 PM	Bypass valve closed
4/8/2011	4:09:52 PM	Bubbler valve closed
4/8/2011	4:09:52 PM	Helium MFC set to  0.000000
4/8/2011	4:09:52 PM	H2 MFC set to  0.000000
4/8/2011	4:09:52 PM	BCl3 MFC set to  0.000000
4/8/2011	4:09:52 PM	PHl3 MFC set to  0.000000
4/8/2011	4:09:52 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:09:52 PM	Bypass solenoid MFC set to  760.000000
4/8/2011	4:09:52 PM	Tube furnace set to 0
4/8/2011	4:10:06 PM	Helium MFC set to  500.000000
4/8/2011	4:10:10 PM	Helium valve opened
4/8/2011	4:10:12 PM	Helium valve closed
4/8/2011	4:10:20 PM	Helium valve opened
4/8/2011	4:10:24 PM	Bubbler valve opened
4/8/2011	4:36:18 PM	Helium MFC set to  0.000000
4/8/2011	4:36:20 PM	Helium valve closed
4/8/2011	4:36:21 PM	Bubbler valve closed
4/8/2011	4:39:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2011	4:39:27 PM	Recipe started at 4:39 PM
4/8/2011	4:39:27 PM	Helium valve closed
4/8/2011	4:39:27 PM	H2 valve closed
4/8/2011	4:39:27 PM	BCl3 valve closed
4/8/2011	4:39:27 PM	PH3 valve closed
4/8/2011	4:39:27 PM	SiCl4 pre valve closed
4/8/2011	4:39:27 PM	SiCl4 post valve closed
4/8/2011	4:39:27 PM	Main Vac valve closed
4/8/2011	4:39:27 PM	Bubbler valve closed
4/8/2011	4:39:27 PM	Bypass valve opened
4/8/2011	4:39:27 PM	Helium MFC set to  0.000000
4/8/2011	4:39:27 PM	H2 MFC set to  0.000000
4/8/2011	4:39:27 PM	BCl3 MFC set to  0.000000
4/8/2011	4:39:27 PM	PHl3 MFC set to  0.000000
4/8/2011	4:39:27 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:39:27 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:39:27 PM	Tube furnace set to 0
4/8/2011	4:39:56 PM	Helium valve closed
4/8/2011	4:39:56 PM	H2 valve closed
4/8/2011	4:39:56 PM	BCl3 valve closed
4/8/2011	4:39:56 PM	PH3 valve closed
4/8/2011	4:39:56 PM	SiCl4 pre valve closed
4/8/2011	4:39:56 PM	SiCl4 post valve closed
4/8/2011	4:39:56 PM	Bubbler valve closed
4/8/2011	4:39:56 PM	Main Vac valve opened
4/8/2011	4:39:56 PM	Bypass valve opened
4/8/2011	4:39:56 PM	Helium MFC set to  0.000000
4/8/2011	4:39:56 PM	H2 MFC set to  0.000000
4/8/2011	4:39:56 PM	BCl3 MFC set to  0.000000
4/8/2011	4:39:56 PM	PHl3 MFC set to  0.000000
4/8/2011	4:39:56 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:39:56 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:39:57 PM	Tube furnace set to 0
4/8/2011	4:39:57 PM	Run finished at 4:39 PM
4/8/2011	4:39:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2011	4:43:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/8/2011	4:43:39 PM	Recipe started at 4:43 PM
4/8/2011	4:43:39 PM	Helium valve closed
4/8/2011	4:43:39 PM	H2 valve closed
4/8/2011	4:43:39 PM	BCl3 valve closed
4/8/2011	4:43:39 PM	PH3 valve closed
4/8/2011	4:43:39 PM	SiCl4 pre valve closed
4/8/2011	4:43:39 PM	SiCl4 post valve closed
4/8/2011	4:43:39 PM	Main Vac valve closed
4/8/2011	4:43:39 PM	Bubbler valve closed
4/8/2011	4:43:39 PM	Bypass valve opened
4/8/2011	4:43:39 PM	Helium MFC set to  0.000000
4/8/2011	4:43:39 PM	H2 MFC set to  0.000000
4/8/2011	4:43:39 PM	BCl3 MFC set to  0.000000
4/8/2011	4:43:39 PM	PHl3 MFC set to  0.000000
4/8/2011	4:43:39 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:43:39 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:43:39 PM	Tube furnace set to 0
4/8/2011	4:43:39 PM	Helium valve closed
4/8/2011	4:43:39 PM	H2 valve closed
4/8/2011	4:43:39 PM	BCl3 valve closed
4/8/2011	4:43:39 PM	PH3 valve closed
4/8/2011	4:43:39 PM	SiCl4 pre valve closed
4/8/2011	4:43:39 PM	SiCl4 post valve closed
4/8/2011	4:43:39 PM	Bubbler valve closed
4/8/2011	4:43:39 PM	Main Vac valve opened
4/8/2011	4:43:39 PM	Bypass valve opened
4/8/2011	4:43:39 PM	Helium MFC set to  0.000000
4/8/2011	4:43:39 PM	H2 MFC set to  0.000000
4/8/2011	4:43:39 PM	BCl3 MFC set to  0.000000
4/8/2011	4:43:39 PM	PHl3 MFC set to  0.000000
4/8/2011	4:43:39 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:43:39 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:43:39 PM	Tube furnace set to 0
4/8/2011	4:44:39 PM	H2 valve closed
4/8/2011	4:44:39 PM	BCl3 valve closed
4/8/2011	4:44:39 PM	PH3 valve closed
4/8/2011	4:44:39 PM	SiCl4 pre valve closed
4/8/2011	4:44:39 PM	SiCl4 post valve closed
4/8/2011	4:44:39 PM	Bubbler valve closed
4/8/2011	4:44:39 PM	Helium valve opened
4/8/2011	4:44:39 PM	Main Vac valve opened
4/8/2011	4:44:39 PM	Bypass valve opened
4/8/2011	4:44:39 PM	Helium MFC set to  100.000000
4/8/2011	4:44:39 PM	H2 MFC set to  0.000000
4/8/2011	4:44:39 PM	BCl3 MFC set to  0.000000
4/8/2011	4:44:39 PM	PHl3 MFC set to  0.000000
4/8/2011	4:44:39 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:44:39 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:44:39 PM	Tube furnace set to 0
4/8/2011	4:45:39 PM	Helium valve closed
4/8/2011	4:45:39 PM	H2 valve closed
4/8/2011	4:45:39 PM	BCl3 valve closed
4/8/2011	4:45:39 PM	PH3 valve closed
4/8/2011	4:45:39 PM	SiCl4 pre valve closed
4/8/2011	4:45:39 PM	SiCl4 post valve closed
4/8/2011	4:45:39 PM	Bubbler valve closed
4/8/2011	4:45:39 PM	Main Vac valve opened
4/8/2011	4:45:39 PM	Bypass valve opened
4/8/2011	4:45:40 PM	Helium MFC set to  0.000000
4/8/2011	4:45:40 PM	H2 MFC set to  0.000000
4/8/2011	4:45:40 PM	BCl3 MFC set to  0.000000
4/8/2011	4:45:40 PM	PHl3 MFC set to  0.000000
4/8/2011	4:45:40 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:45:40 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:45:40 PM	Tube furnace set to 0
4/8/2011	4:46:40 PM	H2 valve closed
4/8/2011	4:46:40 PM	BCl3 valve closed
4/8/2011	4:46:40 PM	PH3 valve closed
4/8/2011	4:46:40 PM	SiCl4 pre valve closed
4/8/2011	4:46:40 PM	SiCl4 post valve closed
4/8/2011	4:46:40 PM	Bubbler valve closed
4/8/2011	4:46:40 PM	Helium valve opened
4/8/2011	4:46:40 PM	Main Vac valve opened
4/8/2011	4:46:40 PM	Bypass valve opened
4/8/2011	4:46:40 PM	Helium MFC set to  100.000000
4/8/2011	4:46:40 PM	H2 MFC set to  0.000000
4/8/2011	4:46:40 PM	BCl3 MFC set to  0.000000
4/8/2011	4:46:40 PM	PHl3 MFC set to  0.000000
4/8/2011	4:46:40 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:46:40 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:46:40 PM	Tube furnace set to 0
4/8/2011	4:47:40 PM	Helium valve closed
4/8/2011	4:47:40 PM	H2 valve closed
4/8/2011	4:47:40 PM	BCl3 valve closed
4/8/2011	4:47:40 PM	PH3 valve closed
4/8/2011	4:47:40 PM	SiCl4 pre valve closed
4/8/2011	4:47:40 PM	SiCl4 post valve closed
4/8/2011	4:47:40 PM	Bubbler valve closed
4/8/2011	4:47:40 PM	Main Vac valve opened
4/8/2011	4:47:40 PM	Bypass valve opened
4/8/2011	4:47:40 PM	Helium MFC set to  0.000000
4/8/2011	4:47:40 PM	H2 MFC set to  0.000000
4/8/2011	4:47:40 PM	BCl3 MFC set to  0.000000
4/8/2011	4:47:40 PM	PHl3 MFC set to  0.000000
4/8/2011	4:47:40 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:47:40 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:47:40 PM	Tube furnace set to 0
4/8/2011	4:48:40 PM	H2 valve closed
4/8/2011	4:48:40 PM	BCl3 valve closed
4/8/2011	4:48:40 PM	PH3 valve closed
4/8/2011	4:48:40 PM	SiCl4 pre valve closed
4/8/2011	4:48:40 PM	SiCl4 post valve closed
4/8/2011	4:48:40 PM	Bubbler valve closed
4/8/2011	4:48:40 PM	Helium valve opened
4/8/2011	4:48:40 PM	Main Vac valve opened
4/8/2011	4:48:40 PM	Bypass valve opened
4/8/2011	4:48:40 PM	Helium MFC set to  100.000000
4/8/2011	4:48:40 PM	H2 MFC set to  0.000000
4/8/2011	4:48:40 PM	BCl3 MFC set to  0.000000
4/8/2011	4:48:40 PM	PHl3 MFC set to  0.000000
4/8/2011	4:48:40 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:48:40 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:48:40 PM	Tube furnace set to 0
4/8/2011	4:49:40 PM	Helium valve closed
4/8/2011	4:49:40 PM	H2 valve closed
4/8/2011	4:49:40 PM	BCl3 valve closed
4/8/2011	4:49:40 PM	PH3 valve closed
4/8/2011	4:49:40 PM	SiCl4 pre valve closed
4/8/2011	4:49:40 PM	SiCl4 post valve closed
4/8/2011	4:49:40 PM	Bubbler valve closed
4/8/2011	4:49:40 PM	Main Vac valve opened
4/8/2011	4:49:40 PM	Bypass valve opened
4/8/2011	4:49:40 PM	Helium MFC set to  0.000000
4/8/2011	4:49:40 PM	H2 MFC set to  0.000000
4/8/2011	4:49:40 PM	BCl3 MFC set to  0.000000
4/8/2011	4:49:40 PM	PHl3 MFC set to  0.000000
4/8/2011	4:49:40 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:49:40 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:49:40 PM	Tube furnace set to 0
4/8/2011	4:50:41 PM	H2 valve closed
4/8/2011	4:50:41 PM	BCl3 valve closed
4/8/2011	4:50:41 PM	PH3 valve closed
4/8/2011	4:50:41 PM	SiCl4 pre valve closed
4/8/2011	4:50:41 PM	SiCl4 post valve closed
4/8/2011	4:50:41 PM	Bubbler valve closed
4/8/2011	4:50:41 PM	Helium valve opened
4/8/2011	4:50:41 PM	Main Vac valve opened
4/8/2011	4:50:41 PM	Bypass valve opened
4/8/2011	4:50:41 PM	Helium MFC set to  100.000000
4/8/2011	4:50:41 PM	H2 MFC set to  0.000000
4/8/2011	4:50:41 PM	BCl3 MFC set to  0.000000
4/8/2011	4:50:41 PM	PHl3 MFC set to  0.000000
4/8/2011	4:50:41 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:50:41 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:50:41 PM	Tube furnace set to 0
4/8/2011	4:51:41 PM	Helium valve closed
4/8/2011	4:51:41 PM	H2 valve closed
4/8/2011	4:51:41 PM	BCl3 valve closed
4/8/2011	4:51:41 PM	PH3 valve closed
4/8/2011	4:51:41 PM	SiCl4 pre valve closed
4/8/2011	4:51:41 PM	SiCl4 post valve closed
4/8/2011	4:51:41 PM	Bubbler valve closed
4/8/2011	4:51:41 PM	Main Vac valve opened
4/8/2011	4:51:41 PM	Bypass valve opened
4/8/2011	4:51:41 PM	Helium MFC set to  0.000000
4/8/2011	4:51:41 PM	H2 MFC set to  0.000000
4/8/2011	4:51:41 PM	BCl3 MFC set to  0.000000
4/8/2011	4:51:41 PM	PHl3 MFC set to  0.000000
4/8/2011	4:51:41 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:51:41 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:51:41 PM	Tube furnace set to 0
4/8/2011	4:52:41 PM	H2 valve closed
4/8/2011	4:52:41 PM	BCl3 valve closed
4/8/2011	4:52:41 PM	PH3 valve closed
4/8/2011	4:52:41 PM	SiCl4 pre valve closed
4/8/2011	4:52:41 PM	SiCl4 post valve closed
4/8/2011	4:52:41 PM	Bubbler valve closed
4/8/2011	4:52:41 PM	Helium valve opened
4/8/2011	4:52:41 PM	Main Vac valve opened
4/8/2011	4:52:41 PM	Bypass valve opened
4/8/2011	4:52:41 PM	Helium MFC set to  100.000000
4/8/2011	4:52:41 PM	H2 MFC set to  0.000000
4/8/2011	4:52:41 PM	BCl3 MFC set to  0.000000
4/8/2011	4:52:41 PM	PHl3 MFC set to  0.000000
4/8/2011	4:52:41 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:52:41 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:52:41 PM	Tube furnace set to 0
4/8/2011	4:53:41 PM	Helium valve closed
4/8/2011	4:53:41 PM	H2 valve closed
4/8/2011	4:53:41 PM	BCl3 valve closed
4/8/2011	4:53:41 PM	PH3 valve closed
4/8/2011	4:53:41 PM	SiCl4 pre valve closed
4/8/2011	4:53:41 PM	SiCl4 post valve closed
4/8/2011	4:53:41 PM	Bubbler valve closed
4/8/2011	4:53:41 PM	Main Vac valve opened
4/8/2011	4:53:41 PM	Bypass valve opened
4/8/2011	4:53:41 PM	Helium MFC set to  0.000000
4/8/2011	4:53:41 PM	H2 MFC set to  0.000000
4/8/2011	4:53:41 PM	BCl3 MFC set to  0.000000
4/8/2011	4:53:41 PM	PHl3 MFC set to  0.000000
4/8/2011	4:53:41 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:53:41 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:53:41 PM	Tube furnace set to 0
4/8/2011	4:54:41 PM	H2 valve closed
4/8/2011	4:54:41 PM	BCl3 valve closed
4/8/2011	4:54:41 PM	PH3 valve closed
4/8/2011	4:54:41 PM	SiCl4 pre valve closed
4/8/2011	4:54:41 PM	SiCl4 post valve closed
4/8/2011	4:54:41 PM	Bubbler valve closed
4/8/2011	4:54:41 PM	Helium valve opened
4/8/2011	4:54:41 PM	Main Vac valve opened
4/8/2011	4:54:41 PM	Bypass valve opened
4/8/2011	4:54:41 PM	Helium MFC set to  100.000000
4/8/2011	4:54:41 PM	H2 MFC set to  0.000000
4/8/2011	4:54:41 PM	BCl3 MFC set to  0.000000
4/8/2011	4:54:41 PM	PHl3 MFC set to  0.000000
4/8/2011	4:54:41 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:54:41 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:54:42 PM	Tube furnace set to 0
4/8/2011	4:55:42 PM	Helium valve closed
4/8/2011	4:55:42 PM	H2 valve closed
4/8/2011	4:55:42 PM	BCl3 valve closed
4/8/2011	4:55:42 PM	PH3 valve closed
4/8/2011	4:55:42 PM	SiCl4 pre valve closed
4/8/2011	4:55:42 PM	SiCl4 post valve closed
4/8/2011	4:55:42 PM	Bubbler valve closed
4/8/2011	4:55:42 PM	Main Vac valve opened
4/8/2011	4:55:42 PM	Bypass valve opened
4/8/2011	4:55:42 PM	Helium MFC set to  0.000000
4/8/2011	4:55:42 PM	H2 MFC set to  0.000000
4/8/2011	4:55:42 PM	BCl3 MFC set to  0.000000
4/8/2011	4:55:42 PM	PHl3 MFC set to  0.000000
4/8/2011	4:55:42 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:55:42 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:55:42 PM	Tube furnace set to 0
4/8/2011	4:56:42 PM	H2 valve closed
4/8/2011	4:56:42 PM	BCl3 valve closed
4/8/2011	4:56:42 PM	PH3 valve closed
4/8/2011	4:56:42 PM	SiCl4 pre valve closed
4/8/2011	4:56:42 PM	SiCl4 post valve closed
4/8/2011	4:56:42 PM	Bubbler valve closed
4/8/2011	4:56:42 PM	Helium valve opened
4/8/2011	4:56:42 PM	Main Vac valve opened
4/8/2011	4:56:42 PM	Bypass valve opened
4/8/2011	4:56:42 PM	Helium MFC set to  100.000000
4/8/2011	4:56:42 PM	H2 MFC set to  0.000000
4/8/2011	4:56:42 PM	BCl3 MFC set to  0.000000
4/8/2011	4:56:42 PM	PHl3 MFC set to  0.000000
4/8/2011	4:56:42 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:56:42 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:56:42 PM	Tube furnace set to 0
4/8/2011	4:57:42 PM	Helium valve closed
4/8/2011	4:57:42 PM	H2 valve closed
4/8/2011	4:57:42 PM	BCl3 valve closed
4/8/2011	4:57:42 PM	PH3 valve closed
4/8/2011	4:57:42 PM	SiCl4 pre valve closed
4/8/2011	4:57:42 PM	SiCl4 post valve closed
4/8/2011	4:57:42 PM	Bubbler valve closed
4/8/2011	4:57:42 PM	Main Vac valve opened
4/8/2011	4:57:42 PM	Bypass valve opened
4/8/2011	4:57:42 PM	Helium MFC set to  0.000000
4/8/2011	4:57:42 PM	H2 MFC set to  0.000000
4/8/2011	4:57:42 PM	BCl3 MFC set to  0.000000
4/8/2011	4:57:42 PM	PHl3 MFC set to  0.000000
4/8/2011	4:57:42 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:57:42 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:57:42 PM	Tube furnace set to 0
4/8/2011	4:58:42 PM	H2 valve closed
4/8/2011	4:58:42 PM	BCl3 valve closed
4/8/2011	4:58:42 PM	PH3 valve closed
4/8/2011	4:58:42 PM	SiCl4 pre valve closed
4/8/2011	4:58:42 PM	SiCl4 post valve closed
4/8/2011	4:58:42 PM	Bubbler valve closed
4/8/2011	4:58:42 PM	Helium valve opened
4/8/2011	4:58:42 PM	Main Vac valve opened
4/8/2011	4:58:42 PM	Bypass valve opened
4/8/2011	4:58:42 PM	Helium MFC set to  100.000000
4/8/2011	4:58:42 PM	H2 MFC set to  0.000000
4/8/2011	4:58:42 PM	BCl3 MFC set to  0.000000
4/8/2011	4:58:42 PM	PHl3 MFC set to  0.000000
4/8/2011	4:58:42 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:58:42 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:58:42 PM	Tube furnace set to 0
4/8/2011	4:59:42 PM	Helium valve closed
4/8/2011	4:59:42 PM	H2 valve closed
4/8/2011	4:59:42 PM	BCl3 valve closed
4/8/2011	4:59:42 PM	PH3 valve closed
4/8/2011	4:59:42 PM	SiCl4 pre valve closed
4/8/2011	4:59:42 PM	SiCl4 post valve closed
4/8/2011	4:59:42 PM	Bubbler valve closed
4/8/2011	4:59:42 PM	Main Vac valve opened
4/8/2011	4:59:42 PM	Bypass valve opened
4/8/2011	4:59:42 PM	Helium MFC set to  0.000000
4/8/2011	4:59:42 PM	H2 MFC set to  0.000000
4/8/2011	4:59:42 PM	BCl3 MFC set to  0.000000
4/8/2011	4:59:42 PM	PHl3 MFC set to  0.000000
4/8/2011	4:59:42 PM	SiCl4 MFC set to  0.000000
4/8/2011	4:59:42 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	4:59:43 PM	Tube furnace set to 0
4/8/2011	5:00:43 PM	H2 valve closed
4/8/2011	5:00:43 PM	BCl3 valve closed
4/8/2011	5:00:43 PM	PH3 valve closed
4/8/2011	5:00:43 PM	SiCl4 pre valve closed
4/8/2011	5:00:43 PM	SiCl4 post valve closed
4/8/2011	5:00:43 PM	Bubbler valve closed
4/8/2011	5:00:43 PM	Helium valve opened
4/8/2011	5:00:43 PM	Main Vac valve opened
4/8/2011	5:00:43 PM	Bypass valve opened
4/8/2011	5:00:43 PM	Helium MFC set to  100.000000
4/8/2011	5:00:43 PM	H2 MFC set to  0.000000
4/8/2011	5:00:43 PM	BCl3 MFC set to  0.000000
4/8/2011	5:00:43 PM	PHl3 MFC set to  0.000000
4/8/2011	5:00:43 PM	SiCl4 MFC set to  0.000000
4/8/2011	5:00:43 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	5:00:43 PM	Tube furnace set to 0
4/8/2011	5:01:43 PM	Helium valve closed
4/8/2011	5:01:43 PM	H2 valve closed
4/8/2011	5:01:43 PM	BCl3 valve closed
4/8/2011	5:01:43 PM	PH3 valve closed
4/8/2011	5:01:43 PM	SiCl4 pre valve closed
4/8/2011	5:01:43 PM	SiCl4 post valve closed
4/8/2011	5:01:43 PM	Bubbler valve closed
4/8/2011	5:01:43 PM	Main Vac valve opened
4/8/2011	5:01:43 PM	Bypass valve opened
4/8/2011	5:01:43 PM	Helium MFC set to  0.000000
4/8/2011	5:01:43 PM	H2 MFC set to  0.000000
4/8/2011	5:01:43 PM	BCl3 MFC set to  0.000000
4/8/2011	5:01:43 PM	PHl3 MFC set to  0.000000
4/8/2011	5:01:43 PM	SiCl4 MFC set to  0.000000
4/8/2011	5:01:43 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	5:01:43 PM	Tube furnace set to 0
4/8/2011	5:02:43 PM	H2 valve closed
4/8/2011	5:02:43 PM	BCl3 valve closed
4/8/2011	5:02:43 PM	PH3 valve closed
4/8/2011	5:02:43 PM	SiCl4 pre valve closed
4/8/2011	5:02:43 PM	SiCl4 post valve closed
4/8/2011	5:02:43 PM	Bubbler valve closed
4/8/2011	5:02:43 PM	Helium valve opened
4/8/2011	5:02:43 PM	Main Vac valve opened
4/8/2011	5:02:43 PM	Bypass valve opened
4/8/2011	5:02:43 PM	Helium MFC set to  100.000000
4/8/2011	5:02:43 PM	H2 MFC set to  0.000000
4/8/2011	5:02:43 PM	BCl3 MFC set to  0.000000
4/8/2011	5:02:43 PM	PHl3 MFC set to  0.000000
4/8/2011	5:02:43 PM	SiCl4 MFC set to  0.000000
4/8/2011	5:02:43 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	5:02:43 PM	Tube furnace set to 0
4/8/2011	5:03:43 PM	Helium valve closed
4/8/2011	5:03:43 PM	H2 valve closed
4/8/2011	5:03:43 PM	BCl3 valve closed
4/8/2011	5:03:43 PM	PH3 valve closed
4/8/2011	5:03:43 PM	SiCl4 pre valve closed
4/8/2011	5:03:43 PM	SiCl4 post valve closed
4/8/2011	5:03:43 PM	Bubbler valve closed
4/8/2011	5:03:43 PM	Main Vac valve opened
4/8/2011	5:03:43 PM	Bypass valve opened
4/8/2011	5:03:43 PM	Helium MFC set to  0.000000
4/8/2011	5:03:43 PM	H2 MFC set to  0.000000
4/8/2011	5:03:43 PM	BCl3 MFC set to  0.000000
4/8/2011	5:03:43 PM	PHl3 MFC set to  0.000000
4/8/2011	5:03:43 PM	SiCl4 MFC set to  0.000000
4/8/2011	5:03:43 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	5:03:43 PM	Tube furnace set to 0
4/8/2011	5:03:44 PM	Run finished at 5:03 PM
4/8/2011	5:03:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/8/2011	5:08:08 PM	Recipe started at 5:08 PM
4/8/2011	5:08:08 PM	Helium valve closed
4/8/2011	5:08:08 PM	BCl3 valve closed
4/8/2011	5:08:08 PM	PH3 valve closed
4/8/2011	5:08:08 PM	SiCl4 pre valve closed
4/8/2011	5:08:08 PM	SiCl4 post valve closed
4/8/2011	5:08:08 PM	Main Vac valve closed
4/8/2011	5:08:08 PM	Bypass valve closed
4/8/2011	5:08:08 PM	Bubbler valve closed
4/8/2011	5:08:08 PM	H2 valve opened
4/8/2011	5:08:08 PM	Helium MFC set to  0.000000
4/8/2011	5:08:08 PM	H2 MFC set to  500.000000
4/8/2011	5:08:08 PM	BCl3 MFC set to  0.000000
4/8/2011	5:08:08 PM	PHl3 MFC set to  0.000000
4/8/2011	5:08:08 PM	SiCl4 MFC set to  0.000000
4/8/2011	5:08:08 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	5:08:08 PM	Tube furnace set to 0
4/8/2011	5:09:26 PM	Helium valve closed
4/8/2011	5:09:26 PM	BCl3 valve closed
4/8/2011	5:09:26 PM	PH3 valve closed
4/8/2011	5:09:26 PM	SiCl4 pre valve closed
4/8/2011	5:09:26 PM	SiCl4 post valve closed
4/8/2011	5:09:26 PM	Main Vac valve closed
4/8/2011	5:09:26 PM	Bypass valve closed
4/8/2011	5:09:26 PM	H2 valve opened
4/8/2011	5:09:26 PM	Bubbler valve opened
4/8/2011	5:09:26 PM	Helium MFC set to  0.000000
4/8/2011	5:09:26 PM	H2 MFC set to  500.000000
4/8/2011	5:09:26 PM	BCl3 MFC set to  0.000000
4/8/2011	5:09:26 PM	PHl3 MFC set to  0.000000
4/8/2011	5:09:26 PM	SiCl4 MFC set to  0.000000
4/8/2011	5:09:26 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	5:09:26 PM	Tube furnace set to 1050
4/8/2011	5:29:27 PM	Helium valve closed
4/8/2011	5:29:27 PM	PH3 valve closed
4/8/2011	5:29:27 PM	Main Vac valve closed
4/8/2011	5:29:27 PM	Bypass valve closed
4/8/2011	5:29:27 PM	H2 valve opened
4/8/2011	5:29:27 PM	BCl3 valve opened
4/8/2011	5:29:27 PM	SiCl4 pre valve opened
4/8/2011	5:29:27 PM	SiCl4 post valve opened
4/8/2011	5:29:27 PM	Bubbler valve opened
4/8/2011	5:29:27 PM	Helium MFC set to  0.000000
4/8/2011	5:29:27 PM	H2 MFC set to  500.000000
4/8/2011	5:29:27 PM	BCl3 MFC set to  3.000000
4/8/2011	5:29:27 PM	PHl3 MFC set to  0.000000
4/8/2011	5:29:27 PM	SiCl4 MFC set to  50.000000
4/8/2011	5:29:27 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	5:29:27 PM	Tube furnace set to 1050
4/8/2011	5:49:27 PM	H2 valve closed
4/8/2011	5:49:27 PM	BCl3 valve closed
4/8/2011	5:49:27 PM	PH3 valve closed
4/8/2011	5:49:27 PM	SiCl4 pre valve closed
4/8/2011	5:49:27 PM	SiCl4 post valve closed
4/8/2011	5:49:27 PM	Main Vac valve closed
4/8/2011	5:49:27 PM	Bypass valve closed
4/8/2011	5:49:27 PM	Helium valve opened
4/8/2011	5:49:27 PM	Bubbler valve opened
4/8/2011	5:49:27 PM	Helium MFC set to  500.000000
4/8/2011	5:49:27 PM	H2 MFC set to  0.000000
4/8/2011	5:49:27 PM	BCl3 MFC set to  0.000000
4/8/2011	5:49:27 PM	PHl3 MFC set to  0.000000
4/8/2011	5:49:27 PM	SiCl4 MFC set to  0.000000
4/8/2011	5:49:27 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	5:49:27 PM	Tube furnace set to 0
4/8/2011	6:09:27 PM	Helium valve closed
4/8/2011	6:09:27 PM	H2 valve closed
4/8/2011	6:09:27 PM	BCl3 valve closed
4/8/2011	6:09:27 PM	PH3 valve closed
4/8/2011	6:09:27 PM	SiCl4 pre valve closed
4/8/2011	6:09:27 PM	SiCl4 post valve closed
4/8/2011	6:09:27 PM	Main Vac valve closed
4/8/2011	6:09:27 PM	Bypass valve closed
4/8/2011	6:09:27 PM	Bubbler valve closed
4/8/2011	6:09:27 PM	Helium MFC set to  0.000000
4/8/2011	6:09:27 PM	H2 MFC set to  0.000000
4/8/2011	6:09:27 PM	BCl3 MFC set to  0.000000
4/8/2011	6:09:27 PM	PHl3 MFC set to  0.000000
4/8/2011	6:09:27 PM	SiCl4 MFC set to  0.000000
4/8/2011	6:09:27 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	6:09:27 PM	Tube furnace set to 0
4/8/2011	6:09:27 PM	Run finished at 6:09 PM
4/8/2011	6:25:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/8/2011	6:25:35 PM	Recipe started at 6:25 PM
4/8/2011	6:25:35 PM	H2 valve closed
4/8/2011	6:25:35 PM	BCl3 valve closed
4/8/2011	6:25:35 PM	PH3 valve closed
4/8/2011	6:25:35 PM	SiCl4 pre valve closed
4/8/2011	6:25:35 PM	SiCl4 post valve closed
4/8/2011	6:25:35 PM	Main Vac valve closed
4/8/2011	6:25:35 PM	Bypass valve closed
4/8/2011	6:25:35 PM	Bubbler valve closed
4/8/2011	6:25:35 PM	Helium valve opened
4/8/2011	6:25:35 PM	Helium MFC set to  500.000000
4/8/2011	6:25:35 PM	H2 MFC set to  0.000000
4/8/2011	6:25:35 PM	BCl3 MFC set to  0.000000
4/8/2011	6:25:35 PM	PHl3 MFC set to  0.000000
4/8/2011	6:25:35 PM	SiCl4 MFC set to  0.000000
4/8/2011	6:25:35 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	6:25:35 PM	Tube furnace set to 0
4/8/2011	6:25:37 PM	Helium valve closed
4/8/2011	6:25:37 PM	H2 valve closed
4/8/2011	6:25:37 PM	BCl3 valve closed
4/8/2011	6:25:37 PM	PH3 valve closed
4/8/2011	6:25:37 PM	SiCl4 pre valve closed
4/8/2011	6:25:37 PM	SiCl4 post valve closed
4/8/2011	6:25:37 PM	Main Vac valve closed
4/8/2011	6:25:37 PM	Bypass valve closed
4/8/2011	6:25:37 PM	Bubbler valve closed
4/8/2011	6:25:37 PM	Helium MFC set to  0.000000
4/8/2011	6:25:37 PM	H2 MFC set to  0.000000
4/8/2011	6:25:37 PM	BCl3 MFC set to  0.000000
4/8/2011	6:25:37 PM	PHl3 MFC set to  0.000000
4/8/2011	6:25:37 PM	SiCl4 MFC set to  0.000000
4/8/2011	6:25:37 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	6:25:38 PM	Tube furnace set to 0
4/8/2011	6:25:38 PM	Run finished at 6:25 PM
4/8/2011	6:25:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/8/2011	6:28:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2011	6:28:52 PM	Recipe started at 6:28 PM
4/8/2011	6:28:52 PM	Helium valve closed
4/8/2011	6:28:52 PM	H2 valve closed
4/8/2011	6:28:52 PM	BCl3 valve closed
4/8/2011	6:28:52 PM	PH3 valve closed
4/8/2011	6:28:52 PM	SiCl4 pre valve closed
4/8/2011	6:28:52 PM	SiCl4 post valve closed
4/8/2011	6:28:52 PM	Main Vac valve closed
4/8/2011	6:28:52 PM	Bubbler valve closed
4/8/2011	6:28:52 PM	Bypass valve opened
4/8/2011	6:28:52 PM	Helium MFC set to  0.000000
4/8/2011	6:28:52 PM	H2 MFC set to  0.000000
4/8/2011	6:28:52 PM	BCl3 MFC set to  0.000000
4/8/2011	6:28:52 PM	PHl3 MFC set to  0.000000
4/8/2011	6:28:52 PM	SiCl4 MFC set to  0.000000
4/8/2011	6:28:52 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	6:28:52 PM	Tube furnace set to 0
4/8/2011	6:29:23 PM	Helium valve closed
4/8/2011	6:29:23 PM	H2 valve closed
4/8/2011	6:29:23 PM	BCl3 valve closed
4/8/2011	6:29:23 PM	PH3 valve closed
4/8/2011	6:29:23 PM	SiCl4 pre valve closed
4/8/2011	6:29:23 PM	SiCl4 post valve closed
4/8/2011	6:29:23 PM	Bubbler valve closed
4/8/2011	6:29:23 PM	Main Vac valve opened
4/8/2011	6:29:23 PM	Bypass valve opened
4/8/2011	6:29:23 PM	Helium MFC set to  0.000000
4/8/2011	6:29:23 PM	H2 MFC set to  0.000000
4/8/2011	6:29:23 PM	BCl3 MFC set to  0.000000
4/8/2011	6:29:23 PM	PHl3 MFC set to  0.000000
4/8/2011	6:29:23 PM	SiCl4 MFC set to  0.000000
4/8/2011	6:29:23 PM	Bypass solenoid MFC set to  0.000000
4/8/2011	6:29:23 PM	Tube furnace set to 0
4/8/2011	6:29:23 PM	Run finished at 6:29 PM
4/8/2011	6:29:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
